Preparation of transmission electron microscope samples
US6194720A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 24, 1998 |
| Grant date | Feb 27, 2001 |
| Priority date | — |
| Expiry date | Jun 24, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N1/32
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sectional transmission electron microscope (TEM) specimen and a method of forming the same is provided. The specimen includes two separate electron transparent regions, namely a first electron transparent segment for analyzing a specific feature and a second electron transparent segment for analyzing bulk features. The first electron transparent segment is formed using a focused ion beam (FIB) technique, while the second electron transparent segment is formed by a wedge forming technique. The latter step is carried out by protecting the first segment with an adhesive filler and a covering glass layer, polishing a surface of the specimen at an angle to an opposite surface, while simultaneously exposing the previously formed first segment, and removing the filler and glass layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.