Fabrication method of a twin-tub capacitor
US6197652A · kind A · utility
2Cited by
6References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 4, 1999 |
| Grant date | Mar 6, 2001 |
| Priority date | — |
| Expiry date | Jun 4, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D1/712
Abstract
A method of fabricating a twin-tub capacitor is described in which a dielectric layer is defined to form multiple column structures, followed by forming a conductive layer over the column structures. The conductive layer on the top surface of the column structures are removed by chemical mechanical polishing to isolate each capacitor. The column structures are further removed to form a twin-tub capacitor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.