Inventor

Dahcheng Lin

22Patents
11h-index
6Co-inventors
60Inventor score

Filing activity: Mar 25, 1998 → Jul 11, 2002

Most-cited inventions

PatentTitleAreaCited byStatus
US6046083A Growth enhancement of hemispherical grain silicon on a doped polysilicon storage node capacitor structure, for dynamic random access memory applications Electricity 58 Expired
US6037238A Process to reduce defect formation occurring during shallow trench isolation formation Electricity 49 Expired
US5913119A Method of selective growth of a hemispherical grain silicon layer on the outer sides of a crown shaped DRAM capacitor structure Electricity 35 Expired
US6037219A One step in situ doped amorphous silicon layers used for selective hemispherical grain silicon formation for crown shaped capacitor applications Emerging Cross-Sectional Technologies 34 Expired
US5897352A Method of manufacturing hemispherical grained polysilicon with improved adhesion and reduced capacitance depletion Electricity 31 Expired
US6074931A Process for recess-free planarization of shallow trench isolation Electricity 30 Expired
US5930625A Method for fabricating a stacked, or crown shaped, capacitor structure Electricity 29 Expired
US5877052A Resolution of hemispherical grained silicon peeling and row-disturb problems for dynamic random access memory, stacked capacitor structures Electricity 25 Expired
US6372572B1 Method of planarizing peripheral circuit region of a DRAM Electricity 14 Expired
US6194265A Process for integrating hemispherical grain silicon and a nitride-oxide capacitor dielectric layer for a dynamic random access memory capacitor structure Electricity 11 Expired
US6004859A Method for fabricating a stack capacitor Emerging Cross-Sectional Technologies 11 Expired
US6127221A In situ, one step, formation of selective hemispherical grain silicon layer, and a nitride-oxide dielectric capacitor layer, for a DRAM application Electricity 10 Expired
US6165830A Method to decrease capacitance depletion, for a DRAM capacitor, via selective deposition of a doped polysilicon layer on a selectively formed hemispherical grain silicon layer Electricity 10 Expired
US6822283B2 Low temperature MIM capacitor for mixed-signal/RF applications Electricity 9 Expired
US6100136A Method of fabricating capacitor capable of maintaining the height of the peripheral area of the capacitor Electricity 8 Expired
US6225214A Method for forming contact plug Electricity 8 Expired
US6130146A In-situ nitride and oxynitride deposition process in the same chamber Emerging Cross-Sectional Technologies 5 Expired
US6240015A Method for reading 2-bit ETOX cells using gate induced drain leakage current Physics 5 Expired
US6197652A Fabrication method of a twin-tub capacitor Electricity 2 Expired
US6162732A Method for reducing capacitance depletion during hemispherical grain polysilicon synthesis for DRAM Emerging Cross-Sectional Technologies 1 Expired
US6294437A Method of manufacturing crown-shaped DRAM capacitor Electricity 1 Expired
US6291294A Method for making a stack bottom storage node having reduced crystallization of amorphous polysilicon Electricity 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.