Graft polymers and use thereof
US6197896A · kind A · utility
33Cited by
7References
42Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 12, 1999 |
| Grant date | Mar 6, 2001 |
| Priority date | — |
| Expiry date | Jul 12, 2019 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC08F8/42
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
Solutions of graft polymers of a polymer having reactive hydrogen groups and grafted through reactive hydrogen groups an alkoxy metallic compound wherein the metal is titanium, zirconium and/or hafnium are useful as photoresist materials which are resistant to plasma. Also, compounds and graft polymers wherein the alkoxy metallic compound also contains silicon, tin or germanium are provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.