Inna V. Babich
7Patents
6h-index
11Co-inventors
56Inventor score
Filing activity: Sep 13, 1991 → Mar 2, 2001
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6685853B1 | Energy sensitive electrically conductive admixtures, uses thereof, methods of fabrication and structures fabricated therewith | Electricity | 62 | Expired |
| US6197896A | Graft polymers and use thereof | Chemistry; Metallurgy | 33 | Expired |
| US5185056A | Method and apparatus for etching semiconductor wafers and developing resists | Electricity | 15 | Expired |
| US6132644A | Energy sensitive electrically conductive admixtures | Electricity | 14 | Expired |
| US6251569A | Forming a pattern of a negative photoresist | Emerging Cross-Sectional Technologies | 13 | Expired |
| US6348299B1 | RIE etch resistant nonchemically amplified resist composition and use thereof | Physics | 9 | Expired |
| US6617086B2 | Forming a pattern of a negative photoresist | Emerging Cross-Sectional Technologies | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.