Method for controlling of certain second phases in aluminum nitride
US6200373A · kind A · utility
1Cited by
10References
9Claims
0Family size
Assignee
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Key dates
| Filing date | May 13, 1999 |
| Grant date | Mar 13, 2001 |
| Priority date | — |
| Expiry date | May 13, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/265
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Electronic packages made with a high area percent coverage of blanket metal may be prone to certain kinds of ceramic defects. In aluminum nitride, these defects may be related to decomposition of the liquid sintering aid. In this experiment, unique additions to the metallization prevented the formation of certain ceramic defects. Our approach involves a unique composition used in an existing process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.