Probe tile and platform for large area wafer probing
US6201402A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Feb 10, 1998 |
| Grant date | Mar 13, 2001 |
| Priority date | — |
| Expiry date | Feb 10, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07342
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and method for a plurality of probe tiles and a probe platform for electrically probing a semiconductor wafer over a broad area of the semiconductor wafer. Nine ceramic tiles are configured in a flat three by three matrix, and are held in place by a probing platform. Each tile may be moved independently in an X and Y direction. The probe platform has three control knobs on the side to move a tile in the X direction and three control knobs on the front to move a tile in the Y direction. The control knobs are attached to transmission shafts which slide back and forth into three ball detent positions. The ball detent positions determine which tile is engaged and can be manipulated. The ceramic tiles hold self-aligning tungsten probe tips to permit semiconductor wafer testing over a wide temperature range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.