Apparatus and method for measurement of the mechanical properties and electromigration of thin films
US6208418A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Feb 10, 2000 |
| Grant date | Mar 27, 2001 |
| Priority date | — |
| Expiry date | Feb 10, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/1717
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for characterizing a sample comprising the steps of depositing the sample on a substrate, measuring a first change in optical response of the sample, changing the lateral strain of the sample, measuring a second change in optical response of the sample, comparing the second change in optical response of with the first change in optical response and associating a difference between the second change and the first change in optical response with a property of interest in the sample. The measurement of the first change in optical response is made with the sample having an initial lateral strain. The measurement of the second change in optical response is made after the lateral strain in the sample is changed from the initial lateral strain to a different lateral strain. The second change in optical response is compared to the first change in optical response to find the difference between the second change and the first change.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.