Interferometric apparatus and method for measuring motion along multiple axes
US6208424A · kind A · utility
45Cited by
4References
54Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 27, 1998 |
| Grant date | Mar 27, 2001 |
| Priority date | — |
| Expiry date | Aug 27, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Interferometric apparatus and method by which polarization effects and stage yaw and pitch are substantially reduced. A beam redirecting means selected from the group consisting of corner mirrors, prisms, diffractive elements, holographic elements, and combinations thereof are fixedly mounted on a body capable of rectilinear motion for movement therewith. The measurement beam path to and from the redirecting means is folded at least once so that incoming and outgoing beam segments are spatially separated and substantially parallel to one another and the reference beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.