Monitoring focus of a lens imaging system based on astigmatism
US6208748A · kind A · utility
14Cited by
3References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 5, 2000 |
| Grant date | Mar 27, 2001 |
| Priority date | — |
| Expiry date | Jan 5, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70641
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Methods for determining a focus position of a lens system based on astigmatism. The methods can be used to monitor the focus of the lens system or to determine the flatness of a surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.