Method and apparatus for ultra-fine pitch wire bonding
US6213378A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Feb 16, 1999 |
| Grant date | Apr 10, 2001 |
| Priority date | — |
| Expiry date | Feb 16, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/20752
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An improved wire bonding capillary construction as well as a variety of improved wire bonding techniques are described. In one method aspect of the invention, the bonding parameters are controlled to prevent the creation of flash. In other aspects bonding parameters are controlled to provide high quality bonds even at relatively low bonding temperatures. By way of example, good bonding may be obtained even at room temperature and/or without preheating the bonding surface whatsoever. Other bonding parameters including bonding force, bond power and duration may also be controlled in a manner that provides good intermetallic formation between the bonding wire and the bonding surface with or without the creation of flash.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.