Vibration damper
US6213444A · kind A · utility
1Cited by
8References
21Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 11, 1999 |
| Grant date | Apr 10, 2001 |
| Priority date | — |
| Expiry date | Mar 11, 2019 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16F15/08
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A vibration damper is described. A vibration damper with a high dampening ability is required for a scanner because of the requirement of the 0.18 .mu.m size devices. The vibration damper is placed between a machine and a floor. The vibration damper has an I-shaped girder structure and a material filling the space between the floor and I-shaped girder structure. A support element having two layers of latticed armatures is mounted on the I-shaped girder structure. The support element is filled with cement. A layer of vibration absorber is placed on the cement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.