System for sorting multiple semiconductor wafers
US6213708A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Mar 12, 1997 |
| Grant date | Apr 10, 2001 |
| Priority date | — |
| Expiry date | Mar 12, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/141
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer sorting system is provided. The wafer sorter system is used to simultaneously sort multiple semiconductor wafers of a cassette. The wafer sorter system includes multiple arms which extend from a tower. These arms are at different vertical locations along the tower. The wafer sorter system also comprises a robotic arm which may move the tower to a position where the arms contact wafers. These wafers are in different vertical slots of a cassette. Further included in the wafer sorter system is a belt which may rotate to move arms vertically through slots of the tower. Wafers may become attached to arms by applying a vacuum suction to each arm. The arms having wafers may be rotated to the belt in a clockwise or counterclockwise direction about a portion of the tower via a slot in the tower. The arms may then be attached to the belt. After the belt moves the arms to new levels of the tower, the arms may then be rotated back to their original positions. The rearranged wafers may then be placed in their original cassette, in several different cassettes, or in one different cassette via turning off the vacuum suction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.