Method of forming ultrasmall structures and apparatus therefor
US6218086A · kind A · utility
24Cited by
5References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 17, 1999 |
| Grant date | Apr 17, 2001 |
| Priority date | — |
| Expiry date | Mar 17, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/878
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention discloses a method of forming ultrasmall (nano) structures in a thin film provided on a substrate by means of a tip which is movable relative to the surface of the thin film. According to principles of the invention, the penetration depth of the tip is limited, thereby avoiding wear of the tip. Furthermore, an apparatus for carrying out the method is disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.