Beam delivery system for molecular fluorine (F2) laser
US6219368A · kind A · utility
130Cited by
9References
44Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 30, 1999 |
| Grant date | Apr 17, 2001 |
| Priority date | — |
| Expiry date | Jun 30, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/134
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method and apparatus are provided for delivering a laser beam from a laser, such as an F.sub.2 laser, to a target through a sealed enclosure. The enclosure is evacuated and back-filled with an inert gas repeatedly for a number of times sufficient to adequately deplete any air, water, hydrocarbons or oxygen within the enclosure. Thereafter, an inert gas flow is established and maintained within the enclosure during operation of the laser. Propagation with significant transmittance of a sub-200 nm beam through the enclosure is particularly enabled.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.