Multiwavelength imaging and spectroscopic photoemission microscope system
US6222187A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jul 2, 1998 |
| Grant date | Apr 24, 2001 |
| Priority date | — |
| Expiry date | Jul 2, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2003/1828
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A multiwavelength imaging and spectroscopic photoemission microscope system (100) which simultaneously provides images in a broad range of the electromagnetic spectrum, such as between 200 nm-1000 nm (optical or visible light) and 1000 nm-500 nm (infrared light). The multiwavelength imaging and spectroscopic photoemission microscope system comprises a microscope (102), a spectrometer (106), a beam splitter (108), a first spectrum focal plane array (110) including an appropriate photodiode (114A), a second spectrum focal plane array (120) including an appropriate photodiode (114B), and a cryogenic vessel (160) to maintain relevant portions of the system at a very low temperature. The invention may be used in failure analysis of integrated circuits and in semiconductor and low temperature physics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.