Patent assignee · SG · UNIVERSITY

Institute of Microelectronics

94Patents
0Active
94Granted
41Portfolio score

Filing activity: Jan 4, 1996 → Apr 8, 2003

Most-cited patents

PatentTitleAreaCited byStatus
US6846725B2 Wafer-level package for micro-electro-mechanical systems Electricity 142 Expired
US5925934A Low cost and highly reliable chip-sized package Electricity 138 Expired
US6100195A Passivation of copper interconnect surfaces with a passivating metal layer Electricity 86 Expired
US6762049B2 Miniaturized multi-chamber thermal cycler for independent thermal multiplexing Performing Operations; Transporting 85 Expired
US6509186B1 Miniaturized thermal cycler Performing Operations; Transporting 83 Expired
US6566961B2 Wide-band single-ended to differential converter in CMOS technology Electricity 76 Expired
US6274650A Epoxy resin compositions for liquid encapsulation Electricity 72 Expired
US6424044B1 Use of boron carbide as an etch-stop and barrier layer for copper dual damascene metallization Electricity 68 Expired
US6534374B2 Single damascene method for RF IC passive component integration in copper interconnect process Electricity 67 Expired
US6717812B1 Apparatus and method for fluid-based cooling of heat-generating devices Electricity 62 Expired
US6472962B1 Inductor-capacitor resonant RF switch Emerging Cross-Sectional Technologies 58 Expired
US6162697A High Q inductor realization for use in MMIC circuits Electricity 54 Expired
US6743713B2 Method of forming dual damascene pattern using dual bottom anti-reflective coatings (BARC) Electricity 54 Expired
US6461902B1 RF LDMOS on partial SOI substrate Emerging Cross-Sectional Technologies 48 Expired
US6468906B1 Passivation of copper interconnect surfaces with a passivating metal layer Electricity 45 Expired
US5893724A Method for forming a highly reliable and planar ball grid array package Electricity 45 Expired
US6667189B1 High performance silicon condenser microphone with perforated single crystal silicon backplate Emerging Cross-Sectional Technologies 43 Expired
US6892060B2 Fully integrated self-tuned image rejection downconversion system Electricity 42 Expired
US5892290A Highly reliable and planar ball grid array package Electricity 37 Expired
US6461888B1 Lateral polysilicon beam process Performing Operations; Transporting 35 Expired
US6432695B1 Miniaturized thermal cycler Performing Operations; Transporting 34 Expired
US6222187A Multiwavelength imaging and spectroscopic photoemission microscope system Physics 34 Expired
US6387798B1 Method of etching trenches for metallization of integrated circuit devices with a narrower width than the design mask profile Electricity 33 Expired
US6748019B1 Dynamic load-balancing between two processing means for real-time video encoding Electricity 32 Expired
US6540866B1 Method for lamination of fluoropolymer to metal and printed circuit board (PCB) substrate Electricity 32 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.