Suspension arrangement for semiconductor accelerometer
US6223598A · kind A · utility
34Cited by
21References
13Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 18, 1997 |
| Grant date | May 1, 2001 |
| Priority date | — |
| Expiry date | Jun 18, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/082
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A suspension mounting arrangement for a suspended layer in a semiconductor accelerometer, the layer being suspended above and spaced apart from a substrate. The arrangement includes a common anchor point associated with the substrate; first and second anchor points associated with the suspended layer; a first flexible serpentine arm coupled between the first anchor point and the common anchor point; and a second flexible serpentine arm coupled between the second anchor point and the common anchor point. The first and second flexible serpentine arms are symmetrically configured with respect to one another.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.