Michael Judy
45Patents
13h-index
57Co-inventors
84Inventor score
Filing activity: Dec 1, 1994 → Dec 17, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5939633A | Apparatus and method for multi-axis capacitive sensing | Physics | 79 | Expired |
| US5542295A | Apparatus to minimize stiction in micromachined structures | Emerging Cross-Sectional Technologies | 43 | Expired |
| US6223598A | Suspension arrangement for semiconductor accelerometer | Physics | 34 | Expired |
| US8447054B2 | Microphone with variable low frequency cutoff | Electricity | 34 | Active |
| US6892576B2 | Reducing offset in accelerometers | Emerging Cross-Sectional Technologies | 33 | Expired |
| US7034393B2 | Semiconductor assembly with conductive rim and method of producing the same | Emerging Cross-Sectional Technologies | 31 | Expired |
| US8146425B2 | MEMS sensor with movable z-axis sensing element | Physics | 23 | Active |
| US7166911B2 | Packaged microchip with premolded-type package | Electricity | 22 | Expired |
| US7083997B2 | Bonded wafer optical MEMS process | Performing Operations; Transporting | 19 | Expired |
| US8344487B2 | Stress mitigation in packaged microchips | Electricity | 19 | Active |
| US7363816B2 | Inertial sensor | Emerging Cross-Sectional Technologies | 19 | Active |
| US10167189B2 | Stress isolation platform for MEMS devices | Electricity | 16 | Active |
| US6148670A | Apparatus and method for multi-axis capacitive sensing | Physics | 14 | Expired |
| US8919199B2 | Apparatus and method for anchoring electrodes in MEMS devices | Emerging Cross-Sectional Technologies | 11 | Active |
| US7720376B2 | Camera with acceleration sensor | Electricity | 11 | Active |
| US8111871B2 | Microphone with pressure relief | Electricity | 11 | Active |
| US8464571B1 | Systems and methods for determining resonant frequency and quality factor of overdamped systems | Physics | 10 | Active |
| US6964894B2 | Apparatus and method of forming a device layer | Performing Operations; Transporting | 8 | Expired |
| US6964882B2 | Fabricating complex micro-electromechanical systems using a flip bonding technique | Performing Operations; Transporting | 7 | Expired |
| US7134340B2 | Apparatus and method for anchoring micromachined structures | Emerging Cross-Sectional Technologies | 7 | Expired |
| US8939029B2 | MEMS sensor with movable Z-axis sensing element | Physics | 7 | Active |
| US9297825B2 | Tilt mode accelerometer with improved offset and noise performance | Physics | 6 | Active |
| US10203352B2 | Anchor tracking apparatus for in-plane accelerometers and related methods | Physics | 6 | Active |
| US7795723B2 | Capped sensor | Performing Operations; Transporting | 6 | Active |
| US7327003B2 | Sensor system | Electricity | 6 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.