Inventor · Ipswich, MA, US

Michael Judy

45Patents
13h-index
57Co-inventors
84Inventor score

Filing activity: Dec 1, 1994 → Dec 17, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US5939633A Apparatus and method for multi-axis capacitive sensing Physics 79 Expired
US5542295A Apparatus to minimize stiction in micromachined structures Emerging Cross-Sectional Technologies 43 Expired
US6223598A Suspension arrangement for semiconductor accelerometer Physics 34 Expired
US8447054B2 Microphone with variable low frequency cutoff Electricity 34 Active
US6892576B2 Reducing offset in accelerometers Emerging Cross-Sectional Technologies 33 Expired
US7034393B2 Semiconductor assembly with conductive rim and method of producing the same Emerging Cross-Sectional Technologies 31 Expired
US8146425B2 MEMS sensor with movable z-axis sensing element Physics 23 Active
US7166911B2 Packaged microchip with premolded-type package Electricity 22 Expired
US7083997B2 Bonded wafer optical MEMS process Performing Operations; Transporting 19 Expired
US8344487B2 Stress mitigation in packaged microchips Electricity 19 Active
US7363816B2 Inertial sensor Emerging Cross-Sectional Technologies 19 Active
US10167189B2 Stress isolation platform for MEMS devices Electricity 16 Active
US6148670A Apparatus and method for multi-axis capacitive sensing Physics 14 Expired
US8919199B2 Apparatus and method for anchoring electrodes in MEMS devices Emerging Cross-Sectional Technologies 11 Active
US7720376B2 Camera with acceleration sensor Electricity 11 Active
US8111871B2 Microphone with pressure relief Electricity 11 Active
US8464571B1 Systems and methods for determining resonant frequency and quality factor of overdamped systems Physics 10 Active
US6964894B2 Apparatus and method of forming a device layer Performing Operations; Transporting 8 Expired
US6964882B2 Fabricating complex micro-electromechanical systems using a flip bonding technique Performing Operations; Transporting 7 Expired
US7134340B2 Apparatus and method for anchoring micromachined structures Emerging Cross-Sectional Technologies 7 Expired
US8939029B2 MEMS sensor with movable Z-axis sensing element Physics 7 Active
US9297825B2 Tilt mode accelerometer with improved offset and noise performance Physics 6 Active
US10203352B2 Anchor tracking apparatus for in-plane accelerometers and related methods Physics 6 Active
US7795723B2 Capped sensor Performing Operations; Transporting 6 Active
US7327003B2 Sensor system Electricity 6 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.