Wafer transfer system
US6224680A · kind A · utility
16Cited by
12References
19Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 9, 1999 |
| Grant date | May 1, 2001 |
| Priority date | — |
| Expiry date | Mar 9, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67778
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer transfer system is described for transferring a wafer while at substantially the same time another wafer is being processed. The wafer transfer system comprises, in one embodiment, a transfer chamber having a wafer transfer blade, a load lock chamber coupled to the transfer chamber, a robot for loading and unloading the wafer into the load lock chamber, and a slider coupled to the wafer transfer blade for moving the wafer transfer blade between the transfer chamber and the load lock chamber. According to a preferred embodiment, the slider utilizes a magnetic coupling mechanism.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.