Active matrix display device using aluminum alloy in scanning signal line or video signal line
US6226059A · kind A · utility
26Cited by
11References
33Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 17, 1998 |
| Grant date | May 1, 2001 |
| Priority date | — |
| Expiry date | Jun 17, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/136295
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An anodized oxide film of Al is formed on a scanning signal line and a gate electrode. Al--Ta is used as material of each of the scanning signal line and gate electrode. The thickness of the anodized oxide film is set to at least 1,000 angstroms. The fabrication yield and reliability can be improved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.