Method of constructing a wafer carrier
US6227590A · kind A · utility
3Cited by
15References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 12, 2000 |
| Grant date | May 8, 2001 |
| Priority date | — |
| Expiry date | Jun 12, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67316
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer carrier for use in the transportation and storage of semiconductor wafers. More particularly, the invention is a wafer carrier having both a rigid structure and a corrosion resistant coating. The wafer carrier includes a unitary frame having several wafer supports joined by connecting members. The frame is coated with a material, such as a fluoropolymer, which is resistant to corrosive materials typically used in semiconductor fabrication processes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.