Organic sidewall spacers used with resist
US6228747A · kind A · utility
16Cited by
9References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 18, 1999 |
| Grant date | May 8, 2001 |
| Priority date | — |
| Expiry date | Mar 18, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/31138
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Disposable spacers of an organic material or a low-temperature inorganic material provide advantages in the formation of STI trenches and contact holes and additional freedom in line spacing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.