Processing apparatus and method, robot apparatus
US6230721A · kind A · utility
8Cited by
6References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 28, 1999 |
| Grant date | May 15, 2001 |
| Priority date | — |
| Expiry date | Apr 28, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present inventions provides a processing apparatus to enable a plurality of processing sections to be installed in a smaller space. The apparatus has a plurality of processing sections arranged at up-down two stages and supplies a material from a processing section situated at one end of either one of an upper or a lower stage. The material is processed at the processing section at one of the upper stage or lower stage and then processed at the other processing section. And it is processed at the processing section situated at one end of the other and collected.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.