Contact exposure process and device
US6232023A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 27, 1999 |
| Grant date | May 15, 2001 |
| Priority date | — |
| Expiry date | Apr 27, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/7035
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A contact exposure device and process in which there is no danger of damage to the mask, and in which the workpiece is not damaged is achieved by a back up ring or the like being provided between a mask carrier and a workpiece carrier. The workpiece carrier and the mask carrier are moved apart from one another by a stipulated distance. The mask and the workpiece are attached by vacuum suction or the like on the mask carrier and the workpiece carrier, respectively. A subatmospheric pressure is produced in the space between the mask and the workpiece. Since the workpiece carrier and the mask carrier are moved apart from one another by a stipulated distance, the mask does bend when the pressure is reduced, but the mask and the workpiece do not come into contact. In this state, air is supplied from a compressor to openings in the workpiece carrier, causing the workpiece to be raised and arranged tightly against the mask, at which point, exposure is performed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.