Electro-mechanical grating device
US6233087A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 18, 1998 |
| Grant date | May 15, 2001 |
| Priority date | — |
| Expiry date | Dec 18, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/1828
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An electro-mechanical grating device for diffracting an incident light beam has a base which defines a surface. A spacer layer is provided above the base, said spacer layer defining an upper surface of said spacer layer. A longitudinal channel is formed in said spacer layer. A plurality of spaced apart deformable ribbon elements are disposed parallel to each other and span the channel. The deformable ribbon elements define a ribbon structure which comprises at least one layer of a single material. The ribbon elements and the electro-mechanical grating device are formed so that charge build-up in layers of the electro-mechanical grating device can be avoided during operation of the device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.