System and method for analyzing semiconductor production data
US6233719A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 27, 1997 |
| Grant date | May 15, 2001 |
| Priority date | — |
| Expiry date | Oct 27, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S707/99931
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A software system and method is disclosed for extending classification attributes in the analysis of production data. The software operates in an object-oriented Windows.RTM. environment with increased flexibility because it permits the user to add classifications by dragging and dropping with a computer mouse. Thus, the system can be changed without reprogramming the software code, and is not limited by preprogrammed classifications. The classifications are preferably cluster classifications of defects in semiconductor processing such as scratches, particles, pinholes and blowouts. When a cluster classification is executed, a production map is filtered to remove the non-defect data according to the selected classification; the defect attribute is then readily visible. The filtered production maps may also be color coded for better visibility so that a plurality of corresponding defects in the map are visible in a plurality of corresponding colors. The maps of a plurality of cluster classifications also may be placed side by side for comparison.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.