Cantilever having sensor system for independent measurement of force and torque
US6237399A · kind A · utility
Inventors
Key dates
| Filing date | Jan 15, 1999 |
| Grant date | May 29, 2001 |
| Priority date | — |
| Expiry date | Jan 15, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/873
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A cantilever structure is provided having a cantilever arm with a piezo-active detector embedded on the surface at the fixed end of the cantilever as well as at a sensing point close to the free end along with an integrated amplification circuitry. Deflection of the cantilever arm is initiated by two different methods: (a) by a force at the free end which induces a surface strain at the base of the cantilever and no strain at the free end and (b) by a torque at the free end which induces a maximum strain at the free end but no strain at the base of the cantilever. In the first case a piezo-active signal is produced only in the detector at the base and in the second case only in the detector close to the free end. When both force and torque cause the deflection of the cantilever end, their contributions are separated by comparing the signals produced by both the detectors with that produced by a third `reference` detector which is not part of the cantilever arm but is still situated in close proximity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.