Patent · US Expired

Apparatus for transferring structures

US6238826A · kind A · utility

1Cited by

2References

23Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventor

Alexander Ruf · Dresden, DE

Key dates

Filing date	Jan 4, 2000
Grant date	May 29, 2001
Priority date	—
Expiry date	Jan 4, 2020

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/20
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An apparatus for transferring structures to a layer to be patterned. The apparatus has a base element and at least one radiation-conducting structure projecting from the base element. The radiation-conducting structure guides radiation to an exit aperture facing away from the base element and the shape of which structure is matched to that of the structure to be transferred.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.