Aluminum nitride-based sintered bodies, corrosion-resistant members, metal-buried articles and semiconductor-holding apparatuses
US6239402A · kind A · utility
298Cited by
3References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 21, 1999 |
| Grant date | May 29, 2001 |
| Priority date | — |
| Expiry date | Jul 21, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
An aluminum nitride-based sintered body is disclosed, which includes aluminum nitride as a main ingredient and magnesium and has a polycrystalline structure composed of aluminum nitride crystals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.