Sensor having a membrane

US6240777A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Christoph Treutler · Wannweil, DE
• Herbert Goebel · Gräfelfing, DE
• Heribert Weber · Leverkusen, DE
• Wolfgang Mueller · Rutesheim, DE
• Steffen Schmidt · Dresden, DE
• Klaus Heyers · Reutlingen, DE
• Hans-Friedemann Kober · Lörrach, DE
• Werner Steiner · Schrobenhausen, DE

Key dates

• Filing date: Oct 6, 1998
• Grant date: Jun 5, 2001
• Expiry date: Oct 6, 2018

Classification

• Technology area (CPC G): Physics
• CPC primary: G01F1/692
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A sensor has a membrane, on which at least one resistor element is situated. The membrane has a membrane layer which is composed of a plurality of partial layers. In addition, a covering layer is provided which is composed of a plurality of partial layers. The partial layers of the membrane and the covering layer are selected so that both in the membrane and in the covering layer light tensile stresses are set, the tensile stresses preferably being roughly the same.