Device for treating substrates in a fluid container
US6240938A · kind A · utility
9Cited by
17References
24Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 6, 1996 |
| Grant date | Jun 5, 2001 |
| Priority date | — |
| Expiry date | Dec 6, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A treatment apparatus for treating substrates includes a fluid container and a device for moving in a reciprocating manner the substrates within the fluid container during treatment to thereby make accessible areas of the substrates that would otherwise be obstructed by parts of the device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.