Device for conveying substrates through a substrate processing plant
US6241079A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 16, 1999 |
| Grant date | Jun 5, 2001 |
| Priority date | — |
| Expiry date | Oct 16, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B7/26
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A device for conveying substrates through a substrate treatment device has a base transport belt defining a transport plane and two lateral transport belts positioned at a first spacing above the base transport belt. The two lateral transport belts are laterally spaced at a second spacing to one another. Each one of the two lateral transport belts defines a lateral transport plane. Each one of the lateral transport planes is positioned at a slant to the transport plane of the base transport belt. The two lateral transport belts and the base transport belt have cutouts for receiving vertically poisoned substrates. At least one of the first spacing and the second spacing is changeable. Also, the slant angle between at least one of the lateral transport planes to the transport plane of the base transport belt is changeable.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.