Multiple-layered ceramic heater
US6242719A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 8, 1999 |
| Grant date | Jun 5, 2001 |
| Priority date | — |
| Expiry date | Jun 8, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67103
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
There is disclosed an integrated type multiple-layered ceramic heater based on resistance heating comprising an electrical insulating ceramic support substrate, a heater pattern composed of electroconductive ceramic or metal, which is adhered to a surface of the substrate, and an electrical insulating ceramic protective layer covering the heater pattern, wherein a feeding terminal of the heater is connected to a power source terminal member through a feeding member which generates heat when supplied with electric current. The feeding member preferably generates heat at a power density substantially equal to that of the heater. The multiple-layered ceramic heater of the present invention exhibits excellent thermal uniformity, and does not adversely affect thermal uniformity of an object to be heated even when the feeding terminal is present at a location facing the object to be heated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.