Substrate transport method and apparatus, and substrate processing system
US6245156A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 11, 1999 |
| Grant date | Jun 12, 2001 |
| Priority date | — |
| Expiry date | Mar 11, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Substrate transporting method comprising (a) inputting process data, (b) determining whether a number of units required for processing the wafer is an odd number or an even number, (c1) when a determination result of the step (b) is an odd number, transporting the wafer, (d1) taking out the wafer by the second arm from a cassette section, (e1) loading the W by the second arm to an odd-numbered unit, (f1) unloading the W by the third arm from an odd-numbered unit, except for a final unit, (g1) loading the W by the third arm to an even-numbered unit, (h1) unloading the W by the second arm from an even-numbered unit, and (i1) unloading the W from the final unit by the first arm and loading the W by the first arm into the cassette section, and (c2) when a determination result of the step (b) is an even number, transporting the W (d2) taking out the W by the third arm from the cassette section, (e2) loading the W by the third arm into an odd-numbered unit, (f2) loading the W by the second arm from an odd-numbered unit, (g2) loading the W by the second arm into an even-numbered unit, (h2) unloading the W by the third arm from an even-numbered unit except for a final unit, and (i2) unload…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.