Coater having a controllable pressurized process chamber for semiconductor processing

US6248398A · kind A · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Homayoun Talieh · San Jose, US
• Alex Lurye · Fremont, US

Key dates

• Filing date: May 22, 1996
• Grant date: Jun 19, 2001
• Expiry date: May 22, 2016

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/162
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A coater having a controllable pressurized process chamber for applying photoresist to a wafer is provided. The controllable pressurized process chamber reduces the evaporation of solvent in the photoresist during a spin-on process step. Reducing premature curing of the photoresist results in improved uniform planarization of the photoresist layer. Contaminants in the photoresist are also reduced by having an environmentally controllable process chamber. A housing having a upper and lower section forms a process chamber surrounding a wafer chuck. The upper housing section includes a solvent vapor opening for introducing pressurized solvent vapor into the process chamber and the lower housing section includes an exhaust opening. The upper housing section also includes an opening for introducing photoresist onto a wafer. A control device is coupled to the exhaust opening and a vacuum device for controlling the pressure in the process chamber. A sealed recycling photoresist container and recycling apparatus is also coupled to the exhaust opening to store unused photoresist. The unused photoresist may be used in subsequent spin-on process steps, thereby reducing processing costs.