Patent · US Expired

Carrier head with a multilayer retaining ring for chemical mechanical polishing

US6251215A · kind A · utility

104Cited by
9References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 3, 1998
Grant dateJun 26, 2001
Priority date—
Expiry dateJun 3, 2018

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB24B37/32
  • WIPO fieldMachine tools
  • WIPO sectorMechanical engineering

Abstract

A carrier head for a chemical mechanical polishing apparatus includes a retaining ring having a flexible lower portion and a rigid upper portion.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.