Anode design for semiconductor deposition
US6251251A · kind A · utility
11Cited by
33References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 16, 1998 |
| Grant date | Jun 26, 2001 |
| Priority date | — |
| Expiry date | Nov 16, 2018 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC25D17/12
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An anode assembly including a perforated anode. A perforated anode holder holds the anode. The anode holder includes perforations at least in a bottom wall such that plating solution may flow through perforations in the anode holder and perforations in the anode. An anode isolator separates the anode and a cathode. The anode isolator includes at least one curvilinear surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.