Antireflective polymer and method of use
US6251562A · kind A · utility
27Cited by
10References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 23, 1998 |
| Grant date | Jun 26, 2001 |
| Priority date | — |
| Expiry date | Dec 23, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/11
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
An antireflective composition includes a polyphenolic polymer which has a first repeating unit and a second repeating unit of the formula: ##STR1## wherein each of R.sub.1, R.sub.2, R.sub.3, R.sub.4, and R.sub.5 is individually a hydroxy group, hydrogen or an azo dye and only one of R.sub.1, R.sub.2, R.sub.3, R4, and R.sub.5 is a hydroxy group.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.