Gregory Breyta
59Patents
11h-index
94Co-inventors
81Inventor score
Filing activity: May 10, 1993 → Oct 9, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5492793A | Photoresist composition | Emerging Cross-Sectional Technologies | 82 | Expired |
| US7393624B2 | Negative resists based on acid-catalyzed elimination of polar molecules | Physics | 41 | Active |
| US7790350B2 | Method and materials for patterning a neutral surface | Electricity | 29 | Active |
| US6806026B2 | Photoresist composition | Emerging Cross-Sectional Technologies | 29 | Expired |
| US5625020A | Photoresist composition | Emerging Cross-Sectional Technologies | 28 | Expired |
| US5585220A | Resist composition with radiation sensitive acid generator | Emerging Cross-Sectional Technologies | 27 | Expired |
| US6251562A | Antireflective polymer and method of use | Emerging Cross-Sectional Technologies | 27 | Expired |
| US8232618B2 | Semiconductor structure having a contact-level air gap within the interlayer dielectrics above a semiconductor device and a method of forming the semiconductor structure using a self-assembly approach | Electricity | 24 | Active |
| US6277546A | Process for imaging of photoresist | Physics | 14 | Expired |
| US8017194B2 | Method and material for a thermally crosslinkable random copolymer | Emerging Cross-Sectional Technologies | 12 | Active |
| US9255194B2 | Methods and materials for depolymerizing polyesters | Emerging Cross-Sectional Technologies | 12 | Active |
| US7563558B2 | Negative resists based on acid-catalyzed elimination of polar molecules | Physics | 11 | Active |
| US6794110B2 | Polymer blend and associated methods of preparation and use | Emerging Cross-Sectional Technologies | 11 | Expired |
| US7300739B2 | Negative resists based on a acid-catalyzed elimination of polar molecules | Physics | 10 | Expired |
| US9914816B2 | Methods and materials for depolymerizing polyesters | Emerging Cross-Sectional Technologies | 10 | Active |
| US6074800A | Photo acid generator compounds, photo resists, and method for improving bias | Emerging Cross-Sectional Technologies | 8 | Expired |
| US7014980B2 | Photoresist composition | Emerging Cross-Sectional Technologies | 6 | Expired |
| US7193023B2 | Low activation energy photoresists | Physics | 5 | Expired |
| US7555828B2 | Method for manufacturing a read sensor for a magnetoresistive head | Emerging Cross-Sectional Technologies | 4 | Expired |
| US11165093B2 | Rechargeable metal halide battery | Emerging Cross-Sectional Technologies | 3 | Active |
| US7638266B2 | Ultrathin polymeric photoacid generator layer and method of fabricating at least one of a device and a mask by using said layer | Physics | 3 | Expired |
| US8515684B2 | System and method for identifying similar molecules | Physics | 3 | Active |
| US7495135B2 | Precursors to fluoroalkanol-containing olefin monomers, and associated methods of synthesis and use | Chemistry; Metallurgy | 3 | Expired |
| US7781157B2 | Method for using compositions containing fluorocarbinols in lithographic processes | Physics | 2 | Active |
| US8124327B2 | Method for using compositions containing fluorocarbinols in lithographic processes | Physics | 2 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.