Membrane probing system
US6256882A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 14, 1998 |
| Grant date | Jul 10, 2001 |
| Priority date | — |
| Expiry date | Jul 14, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/53509
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A substrate, preferably constructed of a ductile material and a tool having the desired shape of the resulting device for contacting contact pads on a test device is brought into contact with the substrate. The tool is preferably constructed of a material that is harder than the substrate so that a depression can be readily made therein. A dielectric (insulative) layer, that is preferably patterned, is supported by the substrate. A conductive material is located within the depressions and then preferably lapped to remove excess from the top surface of the dielectric layer and to provide a flat overall surface. A trace is patterned on the dielectric layer and the conductive material. A polyimide layer is then preferably patterned over the entire surface. The substrate is then removed by any suitable process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.