Substrate treatment device
US6257255A · kind A · utility
2Cited by
21References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 23, 1999 |
| Grant date | Jul 10, 2001 |
| Priority date | — |
| Expiry date | Apr 23, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A device for the treatment of substrates has a container having walls and being filled with a treatment fluid. At least one substrate carrier is mounted in the container so as to move the substrates vertically in a reciprocating manner without a substrate support. Substrate side walls are provided between the substrates and the container walls. These substrate side walls extend parallel to the substrates and are vertically movable in a reciprocating manner with the substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.