Power control apparatus for an ION source having an indirectly heated cathode
US6259210A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Mar 15, 2000 |
| Grant date | Jul 10, 2001 |
| Priority date | — |
| Expiry date | Mar 15, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J27/022
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In a power control apparatus for controlling power supply of an ion source having an indirectly headed cathode, the cathode bias power supply which provides a bias potential between the filament and cathode has an output that is effected by changes in impedance of the electron flow in the region between the filament and the cathode. Such impedance changes can arise due to changes in the chemistry of materials in this region, changes in gas pressure or physical changes, for example. A bias supply controller in the power control apparatus maintains the output power of the cathode bias power supply unit at a desired level, thus not effected by changes in impedance of the electron flow between the filament and the indirectly heated cathode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.