Exposure apparatus and device manufacturing method
US6259509A · kind A · utility
9Cited by
7References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 12, 1999 |
| Grant date | Jul 10, 2001 |
| Priority date | — |
| Expiry date | Feb 12, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/708
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An exposure apparatus includes an illumination system including an optical element and an inside movable portion, and a driving mechanism for driving the movable portion. The driving mechanism includes at least one of a non-contact type bearing and a non-contact type motor. The illumination system can be placed in a predetermined gas ambience, while the movable portion can be placed in the same gas ambience.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.