Integrated device comprising a semiconductor material microactuator, in particular for a hard disk read/write head
US6259584A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 20, 1999 |
| Grant date | Jul 10, 2001 |
| Priority date | — |
| Expiry date | Jul 20, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N1/006
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A microactuator comprises an outer stator and an inner rotor electrostatically coupled to a stator. The rotor comprises a suspended mass with a substantially circular shape, and a plurality of mobile arms extending radially towards the exterior, starting from the suspended mass. The stator has a plurality of pairs of fixed arms extending radially to the suspended mass, a respective mobile arm being arranged between each pair of fixed arms. The fixed arms are divided into fixed drive arms connected to a drive stage for actuating the microactuator, and into fixed measure arms connected to a measure stage, and define a capacitive uncoupling structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.