Benedetto Vigna
91Patents
17h-index
55Co-inventors
87Inventor score
Filing activity: Jul 30, 1997 → Dec 7, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6405592B1 | Hermetically-sealed sensor with a movable microstructure | Physics | 60 | Expired |
| US6508124B1 | Microelectromechanical structure insensitive to mechanical stresses | Performing Operations; Transporting | 55 | Expired |
| US8433084B2 | Assembly of a capacitive acoustic transducer of the microelectromechanical type and package thereof | Electricity | 45 | Active |
| US6869856B2 | Process for manufacturing a semiconductor wafer integrating electronic devices including a structure for electromagnetic decoupling | Electricity | 40 | Expired |
| US8049287B2 | Substrate-level assembly for an integrated device, manufacturing process thereof and related integrated device | Electricity | 36 | Active |
| US6501623B1 | Method for assembling an actuator device for a hard disk, comprising a read/write transducer, a microactuator, and a suspension, and the actuator device thus obtained | Physics | 30 | Expired |
| US5883009A | Method of fabricating integrated semiconductor devices comprising a chemoresistive gas microsensor | Electricity | 28 | Expired |
| US8173513B2 | Method for manufacturing a semiconductor pressure sensor | Physics | 28 | Active |
| US6370954B1 | Semiconductor integrated inertial sensor with calibration microactuator | Physics | 24 | Expired |
| US7252002B2 | Planar inertial sensor, in particular for portable devices having a stand-by function | Electricity | 22 | Expired |
| US6587312B2 | Structure for electrically connecting microelectromechanical devices, in particular microactuators for hard disk drivers | Electricity | 22 | Expired |
| US6605873B1 | Integrated electronic device comprising a mechanical stress protection structure | Electricity | 21 | Expired |
| US6472244B1 | Manufacturing method and integrated microstructures of semiconductor material and integrated piezoresistive pressure sensor having a diaphragm of polycrystalline semiconductor material | Performing Operations; Transporting | 21 | Expired |
| US6469330B1 | Process for manufacturing integrated devices comprising microstructures and associated suspended electrical interconnections | Electricity | 20 | Expired |
| US7793544B2 | Microelectromechanical inertial sensor, in particular for free-fall detection applications | Physics | 19 | Active |
| US6198145A | Method for manufacturing a semiconductor material integrated microactuator, in particular for a hard disc mobile read/write head, and a microactuator obtained thereby | Electricity | 19 | Expired |
| US6209394A | Integrated angular speed sensor device and production method thereof | Electricity | 18 | Expired |
| US6072665A | Suspension arm for a head of a disk storage device | Physics | 17 | Expired |
| US6331444A | Method for manufacturing integrated devices including electromechanical microstructures, without residual stress | Physics | 17 | Expired |
| US6624981B1 | Micrometric actuation, hard disk read/write unit with a flexure and microactuator formed in a monolithic body of semiconductor material | Emerging Cross-Sectional Technologies | 16 | Expired |
| US6090638A | Process for manufacturing high-sensitivity capacitive and resonant integrated sensors, particularly accelerometers and gyroscopes, and sensors made therefrom | Physics | 16 | Expired |
| US7022542B2 | Manufacturing method of a microelectromechanical switch | Electricity | 15 | Expired |
| US7520171B2 | Micro-electromechanical structure with self-compensation of the thermal drifts caused by thermomechanical stress | Physics | 15 | Active |
| US6051854A | Integrated semiconductor device comprising a chemoresistive gas microsensor and manufacturing process thereof | Physics | 15 | Expired |
| US6387725B1 | Production method for integrated angular speed sensor device | Electricity | 15 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.