Bulk chemical delivery system
US6260588A · kind A · utility
9Cited by
43References
38Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 8, 1999 |
| Grant date | Jul 17, 2001 |
| Priority date | — |
| Expiry date | Jun 8, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7043
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A bulk chemical delivery system, that includes a cabinet that houses a delivery system. The delivery system may include a canister within the cabinet that is connected to a manifold within the cabinet that includes at least one output line for providing chemical from the canister outside the cabinet. The delivery system may further include an input system that provides input for operation of the delivery system, wherein the input system is housed in an enclosure, and an inert gas line that connects and supplies inert gas to the enclosure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.