Exposure apparatus
US6266131A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 11, 1999 |
| Grant date | Jul 24, 2001 |
| Priority date | — |
| Expiry date | May 11, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/1303
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of transferring a pattern of a mask onto an object through a projection system, includes the steps of providing a carriage having a mask holder surface adapted to hold the mask in a position which is angularly displaced from a horizontal position by a predetermined angle and an object holder surface adapted to the object in a position which is angularly displaced from the horizontal position by the predetermined angle, the carriage being movable in a first direction; transferring the pattern onto the object, the projection system being located between the mask and the object during the transfer operation; moving the carriage so that the projection system comes to a position out of a place between the mask holder surface and the object holder surface; and conveying the object from the object holder surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.