Method for forming air bridges
US6268262A · kind A · utility
15Cited by
7References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 11, 1997 |
| Grant date | Jul 31, 2001 |
| Priority date | — |
| Expiry date | Aug 11, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Disclosed is a method for making an air bridge in an electronic device. This method uses amorphous silicon carbide to protect electrical conductors in the device during formation of the bridge. The silicon carbide also provides hermetic and physical protection to the device after formation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.