Installation for wet-treating substrates

US6269822A · kind A · utility

Assignee

• Steag Micro Tech GmbH · DE

Inventors

• Jurgen Funkhanel · Donaueschingen, DE
• Dieter Meister · Blumberg, DE
• Martin Weber · Borgo San Lazzaro, DE
• Felix Wehrle · Donaueschingen, DE

Key dates

• Filing date: Mar 22, 1999
• Grant date: Aug 7, 2001
• Expiry date: Mar 22, 2019

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S68/902
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

In a device for the wet treatment of substrates (3) in a container (1), containing a treatment fluid (2), whereby the substrates (3) are introduced into the container (1) with a substrate carrier (5), an optimal alignment and centering of the substrates (3) will result within the container (1) upon lifting from the container (1) with the aid of a substrate receiving device (4) provided within the container (1).